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filingDate 2008-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cceba6fe81045462282790d503b6556c
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publicationDate 2009-01-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2009001906-A
titleOfInvention Layer structure for forming a surface layer on the surface of a substrate and vapor deposition source for manufacturing the layer structure
abstract Provided is a layer structure for forming a surface of a substrate, particularly a tool subjected to wear, and a substrate, particularly a tool, having the layer structure. The composition is [M o Si p AY q ] γ [N r C s O t ] δ, where (o + p + q) = γ, (r + s + t) = δ, and (γ + δ) = 100, 40 ≦ γ ≦ 60, and M includes at least one first hard layer of Al in the periodic table and at least one metal of the group consisting of elements of Group IIb, Vb, and VIb. In the layer structure, AY is selected from the group consisting of Mn, Fe, Co, Ni, Cu, Group IIb element, Main group Ia, IIa, IIIa element, and Lanthanoid element of the periodic table A layer structure characterized by being at least one element. [Selection figure] None
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