| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3124
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-762 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-108
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8242
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-76 |
| filingDate |
2006-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2008-12-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2008547194-A |
| titleOfInvention |
Method to harden hydrogen silsesquioxane and make it dense in nanoscale trench |
| abstract |
A trench in a semiconductor substrate: (I) distributing film-forming material into the trench on the semiconductor substrate; (Ii) curing the dispensed film-forming material in the presence of an oxidizing agent at a first low temperature for a first predetermined period of time; (Iii) curing the dispensed film-forming material in the presence of an oxidant at a second low temperature for a second predetermined period of time; (Iv) curing the dispensed film-forming material in the presence of an oxidizing agent at a third elevated temperature for a third predetermined period of time; (V) The filled oxide trench is filled in the semiconductor substrate by being formed. The film forming material is hydrogen silsesquioxane. |
| priorityDate |
2005-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |