http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008539570-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-62 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2014 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-00 |
| filingDate | 2006-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2008-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008539570-A |
| titleOfInvention | Means for transferring pattern to transfer target |
| abstract | The first surface 13, 14 is formed, and the pattern of the first surface is applied to the transfer target 20 having the second surface 23 covered with the photosensitive film 22, and the patterned first surface is used as the film. A template 10 that can be used for transfer by contact, comprising a carrier base 11 of, for example, nickel, with a waveguide 14 disposed on the carrier base in a first face. The waveguide guides light introduced therein at the radiation input and leaks evanescent waves into the portion 24 of the coating. The template also serves to define a location where evanescent waves can leak into the coating, with a non-transmissive shield 15 disposed on a selected portion of the waveguide in the first plane. The invention further relates to a method and apparatus for using this template and a method for producing this template. [Selection] Figure 2 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009278091-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11675273-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013210559-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7333676-B2 |
| priorityDate | 2005-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.