| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-268
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J61-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2686 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-26 |
| filingDate |
2005-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2008-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2008515200-A |
| titleOfInvention |
Flash lamp annealing equipment |
| abstract |
Disclosed is a flash lamp annealing apparatus that generates electromagnetic radiation having a wavelength greater than and / or smaller than a predetermined wavelength range. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010238768-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2722423-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8765492-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014067904-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8890291-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013073946-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014011256-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013069962-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010109873-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9243345-B2 |
| priorityDate |
2004-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |