Predicate |
Object |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K50-8445 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24992 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249921 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3122 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02211 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45523 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31633 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-022 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B9-00 |
filingDate |
2005-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
2008-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-2008510074-A |
titleOfInvention |
Substrate coated with hydrogenated silicon oxycarbide (H: SiOC) and method for producing the same |
abstract |
A coated substrate comprising a barrier layer comprising silicon oxycarbide having a density of at least 1.6 g / cm 3 and a method for producing the coated substrate. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9169550-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012179762-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017165061-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015092027-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008510075-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012140700-A |
priorityDate |
2004-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |