http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008310278-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_757db2d93afe6d8200b559d9cdb0d06d |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1343 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G09F9-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-13 |
| filingDate | 2007-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8c0565d83e643db745cce0b500bb619e |
| publicationDate | 2008-12-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008310278-A |
| titleOfInvention | Pattern correction method and pattern correction apparatus |
| abstract | An object of the present invention is to provide a pattern correction method capable of correcting an electrode disconnection portion or the like with a thin wire of about 10 μm and having little contamination around a defect portion. In this pattern correction method, the surface of a film 3 is irradiated with laser light to form a groove 3b having a shape corresponding to the defect 2a, and a through hole 3a is formed at the bottom of the groove 3b. The opening portion is opposed to the defective portion 2a with a predetermined gap, the film 3 is pressed against the substrate 1 in a predetermined range including the groove 3b, and the correction paste 10 is applied to the defective portion 2a through the through hole 3a, The film 3 is peeled from the substrate 1 by the restoring force of the film 3. Therefore, since the liquid amount of the correction paste 10 can be limited by the through hole 3a, the correction paste 10 can be prevented from entering between the film 3 and the substrate 1. [Selection] Figure 6 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009103910-A |
| priorityDate | 2007-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.