Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_58ac4593a6956810f8cd442941e2fce4 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-1071 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-03 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-043 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-03 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-107 |
filingDate |
2008-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_302b02be567e1e0cc86fb766e3ee3524 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e84bb9e7fd9abdfe195ae1d345e0573b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d374ea93b19f7960902460f142e7d70 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6d0f3059f7497166b53c012786e56455 |
publicationDate |
2008-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-2008303142-A |
titleOfInvention |
Method for producing polycrystalline silicon |
abstract |
A method for reducing pyrophoric and high boiling disilane concentrations in a process flow. (A) By reacting trichlorosilane with hydrogen, silicon, tetrachlorosilane and disilane represented by the formula H n Cl 6-n Si 2 (where n is a value from 0 to 6). And (B) hydrogenating tetrachlorosilane to trichlorosilane and disilane by simultaneously feeding the effluent mixture and hydrogen to a reactor at a temperature in the range of 800 ° C. to 1200 ° C. A method of producing polycrystalline silicon, comprising the step of effecting the conversion of silane to monosilane. [Selection] Figure 1 |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010116448-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010006689-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102264957-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9238876-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010073725-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5358678-B2 |
priorityDate |
2001-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |