http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008302489-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8fb9f44db08d1c42a53f3d28eaae416f |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B5-84 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
| filingDate | 2007-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4ebb053429fba41535ee660daf9d9e86 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8fecbc5acb38a2882e18df7ee26e6566 |
| publicationDate | 2008-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008302489-A |
| titleOfInvention | Manufacturing method of hard disk substrate |
| abstract | Provided is a hard disk substrate manufacturing method capable of manufacturing a hard disk substrate with improved surface quality, which can reduce the piercing and waviness of abrasive grains on the polished substrate, and a polishing liquid containing aluminum oxide particles and water A step of polishing the substrate while bringing the composition into contact with a polishing pad, wherein the volume-median particle diameter of the secondary particles of the aluminum oxide particles is 0.1 to 0.7 μm, and the particles in the aluminum oxide particles A method for producing a hard disk substrate, wherein the content of particles having a diameter of 1 μm or more is 0.2% by weight or less, and the contact angle of the polishing composition to the polishing pad is 0 to 100 degrees. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012529133-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012000700-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015017259-A |
| priorityDate | 2007-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 126.