http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008299349-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 2008-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_91351f2a8efd90ed402068bb299fcc30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4a98d94247232b53a74e7b71e6ff4459 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_542ba3a7e0ceed7d6e0f9710eab28c11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5783a7a19d175409e79c32dee7015004 |
| publicationDate | 2008-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008299349-A |
| titleOfInvention | Positive radiation sensitive resin composition |
| abstract | Provided is a positive radiation-sensitive resin composition that is excellent in sensitivity and resolution, has a small optical proximity effect, and can ensure a sufficient focus margin for an isolated line pattern. A radiation sensitive resin composition includes (A) a low molecular weight compound in which one or more hydrogen atoms of a compound having an amino group in which a hydrogen atom is bonded to a nitrogen atom are substituted with a t-butoxycarbonyl group, (B) It contains a radiation sensitive acid generator and (C) an acid dissociable group-containing resin. The compound having an amino group in which the hydrogen atom is bonded to the nitrogen atom is represented by the following formula (1): [Chemical 1] (R 1 and R 2 represent a hydrogen atom, an alkyl group, etc.), 1-adamantylamines, nitrogen-containing heterocyclic compounds, etc., and the component (B) is bis (cyclohexanesulfonyl) diazomethane N- (trifluoromethanesulfonyloxy) bicyclo [2.2.1] hept-5-ene-2,3-dicarboximide and the like. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011090286-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013068777-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9120288-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006349940-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006349939-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109557764-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109557764-A |
| priorityDate | 2008-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 513.