| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9ee12a05c7bf51327bc4b4f54e10bc88
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_375e56c930a010a3edfedac830bb8bb1 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05G2-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2007-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d47e1a356747ce8d56b5d17eea2966a0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca0b40a771b19a9b032784da4b74efcf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9624db88cd909d2b6c77ececbf42fe73
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e6d434b81a27fdd226273239cc90ee9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d55b3ee134817fefe46a3577ea8e4fd |
| publicationDate |
2008-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2008293738-A |
| titleOfInvention |
EUV light generation apparatus and method |
| abstract |
PROBLEM TO BE SOLVED: To suppress an apparatus cost and improve energy conversion efficiency and eliminate a position shift of a droplet so that an EUV light output can be stably obtained without variation in energy. A droplet supply means 6 supplies a droplet 1A containing a metal or a metal compound as a target 1 toward an EUV light generation point A along a supply path 1B. The droplet heating means 7 has a heat source 7a disposed around the supply path 1B of the droplet 1A, and heats the droplet 1A with radiant heat radiated from the heat source 7a. [Selection] Figure 2 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10117317-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9497842-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9877378-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9167678-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9265136-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011102277-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9113540-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10251255-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013524464-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20130042488-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108617070-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10306743-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101726281-B1 |
| priorityDate |
2007-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |