| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8e43b4ca6b41ce9f54c9a895d474c81a |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D307-89
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G73-22 |
| filingDate |
2007-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_66157877a0b7e5dcf6f8f9f61935d766 |
| publicationDate |
2008-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2008280261-A |
| titleOfInvention |
Polyimide having hydroxyamide group, precursor thereof, photosensitive resin composition using these, and cured product thereof |
| abstract |
A positive photosensitive resin composition comprising a hydroxyamide group-containing polyimide having a high transmittance at h-line (405 nm) or g-line (435 nm) or a precursor thereof and a diazonaphthoquinone photosensitizer, and the same A polybenzoxazole imide useful as a protective film for a semiconductor device, which is obtained through an alkali development / washing / heat dehydration cyclization reaction step after pattern exposure. A hydroxyamide group-containing polyimide precursor is obtained, for example, by reacting a hydroxyamide group-containing tetracarboxylic dianhydride represented by the following formula (1) with a diamine. The polybenzoxazole imide is obtained by heat-treating a hydroxyamide group-containing polyimide precursor as a raw material. [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011065131-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013094646-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014074772-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103998440-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5757876-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114790664-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114790664-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102271025-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170100794-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115505124-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8466252-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111393379-A |
| priorityDate |
2007-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |