http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008277964-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0950e9df7f0e1b73efee1bda859951ad |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-319 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H3-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-17 |
| filingDate | 2007-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_597e6cbc86e6d6953f879e840d5242e8 |
| publicationDate | 2008-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008277964-A |
| titleOfInvention | Thin film piezoelectric resonator and manufacturing method thereof |
| abstract | A thin film piezoelectric resonator capable of preventing deterioration in characteristics caused by an alignment promoting film and a method for manufacturing the same are provided. A support having a hollow part, a lower electrode provided on the hollow part, a piezoelectric film supported on the support and provided on the lower electrode, and a lower part on the piezoelectric film And an upper electrode provided in a portion facing the electrode, and the entire surface of the lower electrode opposite to the surface in contact with the piezoelectric film is exposed and faces the hollow portion. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013026250-A |
| priorityDate | 2007-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.