http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008273886-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7d171beb89fe9f3e46e819f08abdb750 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
filingDate | 2007-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ff1d4787d7fc159b14f1e3f8f66eca5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4178b2319fa4a9586b9e3f71fe44b27 |
publicationDate | 2008-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2008273886-A |
titleOfInvention | Oxime sulfonate compounds |
abstract | A novel compound that can be used as a component of a resist composition, particularly as an acid generator. The following general formula (I): wherein R 1 is an organic group excluding a (meth) acryloyl group; R 2 is a linear or branched alkylene group having 1 to 5 carbon atoms or fluorinated R 3 is a substituted or unsubstituted phenyl group, 1-naphthyl group or 2-naphthyl group; R 4 is a fluorinated alkyl group having 1 to 5 carbon atoms. ] The compound represented by this. R 3 is preferably a substituted or unsubstituted 1-naphthyl group or 2-naphthyl group. R 1 is preferably a substituted or unsubstituted alkyl group. [Chemical 1] [Selection figure] None |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2017122528-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020158537-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101766796-B1 |
priorityDate | 2007-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 314.