http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008260939-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6988d9908404fcf44b715ec2daa9e579 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D1-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D5-25 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 |
| filingDate | 2008-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_698e28f0435d718cf36515d3283d89dd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_56f8fd2f78736efbb6827830bdfc9bb9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1740cd0f0d59648d37485fceb99e9b2d |
| publicationDate | 2008-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008260939-A |
| titleOfInvention | Coating liquid for forming low dielectric constant silica coating |
| abstract | The dielectric constant is as low as 3 or less, and it is excellent in oxygen plasma resistance at the time of microphotolithography processing, and is low enough to form an insulating film excellent in chemical resistance such as mechanical strength and alkali resistance and crack resistance. Provided are a coating liquid for forming a dielectric constant silica-based film, and a substrate on which such a low dielectric constant silica-based film is formed. [MEANS FOR SOLVING PROBLEMS] (i) One or more types of alkoxysilanes are hydrolyzed, or at least part of the surface of silica fine particles obtained by hydrolyzing and hydrolyzing, phenyl group-containing alkoxysilanes or phenyl groups containing A silica-based fine particle having a phenyl group obtained by binding a hydrolyzate of chlorosilane; and (ii) a polysiloxazan which is a reaction product of an alkoxysilane and / or halogenated silane hydrolyzate and polysilazane. A coating liquid for forming a low dielectric constant silica-based film, comprising a reaction product. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010177647-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9096726-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101387740-B1 |
| priorityDate | 2008-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 124.