http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008251906-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
| filingDate | 2007-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7cf5ed2bb9f51004891e082dfb48740f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8b3cdaaf769f4c415342ad87f36bb8d1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2188cce85f627e039f1fa290a99022d8 |
| publicationDate | 2008-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008251906-A |
| titleOfInvention | Metal polishing composition and chemical mechanical polishing method using the same |
| abstract | Disclosed is a metal polishing composition capable of suppressing dishing, wiring defects, and particles remaining on a device surface, and a chemical mechanical polishing method using the same. (A) A compound represented by the following general formula (A), (b) a compound represented by the following general formula (B), (c) abrasive grains, and (d) a metal containing an oxidizing agent. Polishing composition. In (A), R 1 represents an alkyl group having 1 to 3 carbon atoms, and R 2 represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms. In (B), R 3 and R 4 each independently represent a hydrogen atom, an alkyl group, an aryl group, an alkoxy group, an amino group, or the like. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009117789-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102477259-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102477259-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015036417-A |
| priorityDate | 2007-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 284.