http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008251572-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate | 2007-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_181a1ccd94c5630a6ae1628719d462d5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1facff11c74801421334a59851ec009b |
| publicationDate | 2008-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008251572-A |
| titleOfInvention | Substrate bonding apparatus and substrate bonding method |
| abstract | A substrate bonding apparatus for easily bonding a first substrate and a second substrate supporting the first substrate using a holding agent, and a substrate bonding method using the same. A substrate bonding apparatus includes a first holding device for holding a wafer as a first substrate and a support substrate for a second substrate that is scheduled to be bonded to the first substrate. And a second holding device 20 that holds the first substrate (wafer 4) held by the first holding device 10. In addition, a radiation irradiation device 31 is provided for irradiating and melting the wafer holding agent 7 disposed on the substrates for bonding the substrates. The wafer holding agent 7 is melted by the radiation irradiation device 31 and the wafer 4 and the support substrate 6 are bonded together. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101959151-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9962915-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014374017-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013118579-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I557203-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170044216-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013165130-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010118483-A |
| priorityDate | 2007-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 472.