http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008250157-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2007-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e1b71d0b212b8a18ab126f3c3f2034a5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5629ea1962b41d0773eaf45e8af40283 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_07695a6ae029144c658cbdc3a60dadb3 |
| publicationDate | 2008-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008250157-A |
| titleOfInvention | Positive resist composition and resist pattern forming method |
| abstract | A positive resist composition capable of forming a high-resolution resist pattern and a resist pattern forming method are provided. A positive resist composition comprising a resin component (A) whose solubility in an alkaline developer is increased by the action of an acid, and an acid generator component (B) that generates an acid upon exposure, The resin component (A) is represented by the general formula (1) [in the formula (1), X represents a specific bonding group that is cleaved by the action of an acid; Y and Y ′ each independently represent 1 to 1 carbon atoms; 12 alkylene groups are represented. ] The positive resist composition characterized by including the polymer which has a core part represented by this, and the arm part which couple | bonds with this core part and which consists of a polymer chain obtained by an anionic polymerization method. [Chemical 1] [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012053291-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010055606-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011137099-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010250278-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010286646-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8574809-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008248147-A |
| priorityDate | 2007-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 269.