http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008243923-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2007-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5117df5323734ea44e6f5d31d94aca51 |
| publicationDate | 2008-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008243923-A |
| titleOfInvention | Resist stripping method |
| abstract | The present invention provides a resist stripping method capable of improving the stripping performance of a resist existing on the surface of a substrate without requiring an ashing step. In particular, the present invention provides a resist stripping method excellent in stripping performance of ion-implanted resists. A modification step of modifying a resist with a resist modifying solution containing an oxidizing agent to obtain a modified resist and a peeling step of removing the modified resist with a stripping solution not containing an oxidizing agent are performed in this order. And the resist modifying solution and / or the stripping solution contains at least one fluorine compound having an alcoholic hydroxyl group or an ether bond. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019004108-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7001374-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180138139-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109148270-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014022468-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11141758-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102573014-B1 |
| priorityDate | 2007-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 141.