http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008231431-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6988d9908404fcf44b715ec2daa9e579 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D201-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D5-25 |
| filingDate | 2008-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_56f8fd2f78736efbb6827830bdfc9bb9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_698e28f0435d718cf36515d3283d89dd |
| publicationDate | 2008-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008231431-A |
| titleOfInvention | Coating liquid for forming low dielectric constant silica-based film and substrate with low dielectric constant film |
| abstract | Disclosed is a coating liquid for forming a low dielectric constant silica-based film that can form an insulating film having a small relative dielectric constant of 3 or less and excellent in micro-photolithography processing, and such a low dielectric constant silica-based film is formed. Provided substrate. The method includes (i) silica-based fine particles having a phenyl group, and (ii) an oxidatively decomposable resin. And the weight ratio of silica-based fine particles having phenyl groups to oxidatively decomposable resin (silica-based fine particles having phenyl groups / oxidatively decomposable resin) is in the range of 0.5 to 5. A coating liquid for forming a silica-based film. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102186186-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200032056-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150075773-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102186185-B1 |
| priorityDate | 2008-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 109.