http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008224437-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_930d026de3a6f8109fa00a85852fe8e4 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L9-14 |
| filingDate | 2007-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d5d7938e3a7e8e1ba02fe58841f9188 |
| publicationDate | 2008-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008224437-A |
| titleOfInvention | Magnetic pressure sensor |
| abstract | A magnetic pressure sensor capable of performing highly reliable pressure measurement is provided. A contact layer (14a) is formed on a protrusion (11b) of a cavity (18) so as to be electrically connected to a GMR element (13). An electrode pad 15 is formed on the protruding portion 11 a outside the cavity 18. A contact layer 14 b is formed on the protrusion 12 a on the glass substrate 12 inside the cavity 18 so as to be electrically connected to the GMR element 13. An electrode pad 15 is formed on the glass substrate 12 outside the cavity 18, and a contact layer 14 c is formed from the protruding portion 12 a to the electrode pad 15 through the outside of the protruding portion 12 a. A silicon substrate 16 is bonded on the protruding portion 12 a of the glass substrate 12 so as to form a cavity 18 with the glass substrate 12. [Selection] Figure 1 |
| priorityDate | 2007-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 14.