http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008216616-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7ef01e33058cf740cf2197991be97af1 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-62 |
| filingDate | 2007-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f748fa19465f5a0fc594bd728557d7e0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_792e2bb2fa03bb5d7affd251055e8878 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51480abdf0a6defd9be90a65a3b93256 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_43b79161180d70460d20878f42edcf1a |
| publicationDate | 2008-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008216616-A |
| titleOfInvention | Method for producing fluorine-containing resin film and pellicle using the same |
| abstract | The present invention provides a method for producing a fluorine-containing resin film as a self-supporting film without causing defects such as damage, streaks, and whitening that impair transparency. Further, when a fluorine-containing resin film is used as a pellicle film of a pellicle used in a photolithography process, a method is provided in which the film does not become cloudy and ammonium sulfate is not deposited on a mask. [Solution] A fluorine-containing resin film, which is a highly transparent self-supporting film, is manufactured by forming a fluorine-containing resin film on a film-forming substrate treated with a silylating agent containing neither a fluorine atom nor a nitrogen atom. This fluorine-containing resin film is used as a pellicle film. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5608234-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2012004950-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012004950-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102959468-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8815476-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102959468-B |
| priorityDate | 2007-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 138.