http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008203102-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5e5c121269689cbab9b3a4548b15caf3 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L1-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-84 |
| filingDate | 2007-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_030d407e917ad75ff1568bd4ee06d89c |
| publicationDate | 2008-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008203102-A |
| titleOfInvention | Method for manufacturing cantilever and force sensor |
| abstract | A sacrificial layer which is provided on an end portion of a substrate and which can be removed by etching, is supported on the sacrificial layer, and is provided on the deformable layer. In a cantilever beam and force sensor having a stress layer having internal stress, a stress layer that is tougher and harder to break than internal stress can be formed without using a large-scale device. In addition, the present invention provides a method for manufacturing a cantilever and a force sensor that does not require the insulation between the detection unit and the stress layer when the detection unit is provided in the deformation layer. A step of providing a piezoresistive element 4 on a base portion 10 formed by sequentially laminating a substrate 1, a sacrificial layer 2 and a deformation layer 3, and applying a solution containing an organic substance on the base portion 10 and drying to apply stress. A step of providing the layer 5; a step of providing the stress layer 5 and the deformable layer 3 with an inflow recess 6 reaching the sacrificial layer 2 and allowing the etchant to flow; and flowing the etchant into the inflow recess 6 to And a step of removing the part. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103745928-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113125056-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103745915-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103745914-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103745913-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010204069-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104743495-A |
| priorityDate | 2007-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.