http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008196918-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_930d026de3a6f8109fa00a85852fe8e4 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L9-14 |
filingDate | 2007-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5555e9b176a998b48d6eb4af25a883af http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d5d7938e3a7e8e1ba02fe58841f9188 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_646a26b54c0322f723cabace6bcfff0e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cfa4d7cf2da7a01f15ee966de45866af http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e3020b7d0669adf1b4405dfd64f2c610 |
publicationDate | 2008-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2008196918-A |
titleOfInvention | Magnetic pressure sensor |
abstract | There is provided a magnetic pressure sensor in which a substrate having a magnetoresistive effect element and a substrate having a hard magnetic layer are reliably bonded without performing high temperature processing. A magnetic pressure sensor according to the present invention includes a glass substrate 11 having a GMR element 12 provided on one main surface side, and gold-tin eutectic bonding on one main surface of the glass substrate 11. In addition, the silicon substrate 16 having the hard magnetic layer 20 and the gold-tin eutectic bonding region are partitioned so as to face the GMR element 12 and the distance between the glass substrate 11 and the silicon substrate 16 is controlled. And an adhesion improving layer 19 is provided in the gold-tin eutectic bonding region on the silicon substrate 16 side. [Selection] Figure 1 |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8516906-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5295388-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011078043-A1 |
priorityDate | 2007-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.