http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008195862-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D5-12 |
filingDate | 2007-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6447aed45f7552890d0a3062894cceaa http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a55a1ac76182d9688da99180d06355f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92fc605b2e3b56d292a0e3edd1c387a1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ec60ccd9045744a89f8b6fd7aab1e31 |
publicationDate | 2008-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2008195862-A |
titleOfInvention | Insulating film forming composition, silica-based film and method for forming the same |
abstract | Disclosed is an insulating film forming composition that can be suitably used in a semiconductor device or the like for which high integration and multilayering are desired. The composition for forming an insulating film includes at least a specific tetraalkoxysilane compound and a specific silane compound having an oxygen atom, a phenylene group, or an alkylene group having 1 to 6 carbon atoms in the molecule. A first hydrolysis condensate obtained by hydrolytic condensation of 50 to 100 mol% of one silane compound and 0 to 50 mol% of another silane compound, and 2 to 3 alkoxy groups in the molecule A second hydrolytic condensate obtained by hydrolytic condensation of more than 50 mol% of the specified silane compound and less than 50 mol% of the other silane compound, and an organic solvent, The composition for forming an insulating film, wherein the decomposition condensate and the second hydrolysis condensate have a weight average molecular weight of 700 or more and 20,000 or less. [Selection figure] None |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I573692-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5238899-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013227577-A |
priorityDate | 2007-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 942.