http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008195861-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D201-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D5-25 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D1-00 |
| filingDate | 2007-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6447aed45f7552890d0a3062894cceaa http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a55a1ac76182d9688da99180d06355f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92fc605b2e3b56d292a0e3edd1c387a1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ec60ccd9045744a89f8b6fd7aab1e31 |
| publicationDate | 2008-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008195861-A |
| titleOfInvention | Insulating film forming composition, silica-based film and method for forming the same |
| abstract | An insulating film-forming composition having low hygroscopicity, a low relative dielectric constant, and excellent mechanical strength is provided. The composition for forming an insulating film includes at least one silane compound selected from the group consisting of a compound represented by the following general formula (1) and a compound represented by the following general formula (2). A first hydrolysis-condensation product obtained by hydrolytic condensation of mol% and another silane compound 0 to 50 mol%, and at least one silane compound 30-100 represented by the following general formula (1) A second hydrolytic condensate obtained by hydrolytic condensation of mol% and another silane compound 0 to 30 mol%, and an organic solvent, and the molecular weight of the second hydrolytic condensate is: It is larger than the molecular weight of the first hydrolysis condensate. Si (OR 1 ) 4 (1) R 2 a (R 3 O) 3-a Si- (R 6 ) c -Si (OR 4 ) 3-b R 5 b (2) [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012134302-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011154214-A |
| priorityDate | 2007-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 942.