| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_242cc8d15c771395b920cc7de452da6a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H2245-36 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61L2-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61L2-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-2406 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61L2-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61L2-10 |
| filingDate |
2007-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd17fdecc5ac16b4c14c196355c4e1e2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aac143659b65add4a0f21c269212c45d |
| publicationDate |
2008-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2008178679-A |
| titleOfInvention |
Plasma processing equipment |
| abstract |
Toxin that adheres to an object to be processed is inactivated without damaging the object to be processed. In the plasma processing apparatus 1, in order to inactivate toxins adhering to the surface of a processing object 71, a pulsed electric field, nitrogen radicals (N * ), and short-wavelength ultraviolet light having a wavelength of 100 nm to 280 nm (“far ultraviolet light”). ”Or“ UV-C ”) is combined to act on the toxin to nitride or oxidize the toxin and dissipate the toxin from the surface of the object to be treated 71. [Selection] Figure 5 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020189437-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7184683-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020151043-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014178143-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113677376-A |
| priorityDate |
2006-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |