http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008177532-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d231147f38595bbe3114b758cba4a298 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2007-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3dbb0602aa14ba438d5ab261c34ee241 |
| publicationDate | 2008-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008177532-A |
| titleOfInvention | Semiconductor wafer processing method |
| abstract | In a rework process for removing a silicon-containing organic film formed on a semiconductor wafer substrate, a silicon compound residue is generated, which is difficult to remove. At least a first step of cleaning a surface from which a silicon-containing organic film formed on a semiconductor wafer substrate has been removed with an aqueous ammonia solution and a second step of cleaning the surface with a diluted hydrofluoric acid aqueous solution are provided. Process with the method you have. The ammonia concentration in the aqueous ammonia solution is preferably 0.01 weight percent or more and 30 weight percent or less. The concentration of hydrofluoric acid in the diluted hydrofluoric acid aqueous solution is preferably 0.01 weight percent or more and 2.0 weight percent or less. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200029603-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016127119-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102321240-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101362632-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11569085-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019058701-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014170816-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019057600-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013065594-A |
| priorityDate | 2006-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 46.