http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008170869-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1337 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 |
| filingDate | 2007-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_046f5ec590ec929b5d38191753e9cab1 |
| publicationDate | 2008-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008170869-A |
| titleOfInvention | Liquid crystal device manufacturing apparatus and liquid crystal device manufacturing method |
| abstract | An inorganic alignment film is formed with high productivity. The liquid crystal layer is sandwiched between a pair of opposing substrates, and an inorganic alignment film is formed on the inner surface side of at least one of the substrates. The film forming chambers 2 and 2 and the sputtering apparatus 3 for forming an inorganic alignment film by forming an alignment film material on the substrate W by sputtering in the film forming chamber are provided. The sputtering apparatus includes a pair of targets 5a and 5b that are opposed to each other with the plasma generation region interposed therebetween, and openings 3a and 3a that are disposed on both sides of the plasma generation region and release sputtered particles 5p from the plasma generation region. The film formation chamber is provided corresponding to each of the openings. The openings are respectively arranged at positions where the sputtered particles are incident from an oblique direction with respect to the inorganic alignment film forming surface of the substrate in the film forming chamber. [Selection] Figure 1 |
| priorityDate | 2007-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 17.