| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c389d310f52125a947b3408cb0cf3283 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29K105-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29K75-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29L31-58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29L31-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C39-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2007-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d7943d9221081c8cbd8803a80b749f2f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2c6af24fdb8219411ad475d443dbcfb5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44d9121ba4a3712fabedbba2aea5bfa8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce2da415f3775c1c83e309faf6d0f92a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d6790857370b6cb585773ebc260df0b |
| publicationDate |
2008-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2008168589-A |
| titleOfInvention |
Polishing pad manufacturing method |
| abstract |
PROBLEM TO BE SOLVED: To provide a method for easily and inexpensively manufacturing a polishing pad having excellent durability and stability of polishing rate. SOLUTION: A step of preparing a cell-dispersed urethane composition by a mechanical foaming method, a step of applying a cell-dispersed urethane composition on a release sheet, a step of laminating a base material layer on the cell-dispersed urethane composition, a pressing unit A step of forming a polyurethane foam layer having substantially spherical continuous cells by curing the cell-dispersed urethane composition while making the thickness uniform, and a step of peeling the release sheet on the lower surface side of the polyurethane foam layer Manufacturing method. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014069273-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012507409-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014073557-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011005563-A |
| priorityDate |
2007-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |