http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008166749-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6b822ee046eb6c45d1e3bd9ce9c1782e |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 |
| filingDate | 2007-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2627974b94ebbe182a376fa15d81bafd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d8320c11e60183fd8d9bde44a4528270 |
| publicationDate | 2008-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008166749-A |
| titleOfInvention | THIN FILM TRANSISTOR, MANUFACTURING METHOD THEREOF, AND SEMICONDUCTOR DEVICE HAVING THE THIN FILM TRANSISTOR |
| abstract | A thin film transistor and a method for manufacturing the thin film transistor in which a gate leakage defect generated at an end portion of a semiconductor film is reduced and a gate breakdown voltage is improved. An island-shaped semiconductor film having a tapered end surface, a gate insulating film provided in contact with the surface of the semiconductor film and the side end surface, and a gate insulating film provided on the semiconductor film via the gate insulating film A gate electrode layer formed on the gate electrode layer, an insulating film having an opening provided on the gate electrode layer, and an insulating film having the opening provided in contact therewith and connected to the semiconductor film through the opening. A portion of the gate insulating film that is in contact with a side end surface of the semiconductor film includes a halogen and is thicker than a portion of the gate insulating film that is in contact with the surface of the semiconductor film. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011108374-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9673335-B2 |
| priorityDate | 2006-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 57.