http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008161965-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_637b68b452ab6c0e7ebc0679abafad23 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B53-12 |
| filingDate | 2006-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2df8dbe7feacaf91be1cc21cc821536a |
| publicationDate | 2008-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008161965-A |
| titleOfInvention | Polishing cloth dresser |
| abstract | An object of the present invention is to provide a dresser for a polishing cloth that makes it possible to always perform uniform pad grinding regardless of the use time of the dresser by devising the arrangement of abrasive grains on a metal support. A dresser in which a plurality of abrasive grains are fixed to a single layer on the surface of a metal support material, and the surface density of the number of abrasive grains increases as the distance from the center point of the metal support material increases. It has a region. In addition, when the surface density of the number of abrasive grains in the region at a distance of R 1 and R 2 from the center point of the metal support material is D 1 and D 2 respectively, D 2 is (R 2 / R 1 ) × D The value calculated within 1 is preferably within ± 10%. Furthermore, when the linear density in the circumferential direction of the number of abrasive grains in the region at a distance of r 1 and r 2 from the center point of the metal support material is d 1 and d 2 respectively, d 2 is (r 2 / r 1) is preferably a value within ± 10% of the value calculated by × d 1. [Selection figure] None |
| priorityDate | 2006-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.