http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008159992-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 |
filingDate | 2006-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5d0c86d66622e1b9617de6f881731fcb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7c736e7df66afe93f2da42c6d66abc69 |
publicationDate | 2008-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2008159992-A |
titleOfInvention | Inspection jig, inspection apparatus, electronic component inspection method, and electronic component manufacturing method |
abstract | An inspection jig, an inspection apparatus, an electronic component inspection method, and an electronic component manufacturing method capable of performing highly reliable probe inspection are provided. An inspection jig is an inspection jig for performing a probe inspection on an electronic component having a protruding electrode, and the first surface and the first surface are directed in opposite directions. A substrate 10 having a second surface 12, a plurality of resin protrusions 20 formed on the first surface 11 so as to partition a predetermined space 25, and having a top surface narrower than a bottom surface, and predetermined surfaces on the side surfaces of the resin protrusions And a probe 30 formed so as to pass through a region facing the space 25. The bottom surface of the predetermined space 25 is smaller than the bottom surface of the bump electrode 110. Further, the upper surface of the predetermined space 25 is larger than the upper surface of the bump electrode 110. [Selection] Figure 1 |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012195358-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111712714-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111712714-A |
priorityDate | 2006-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Predicate | Subject |
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isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425270609 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69667 |
Total number of triples: 18.