| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_41e00307d71a7333061f80cc9032f076
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_60e21de07fa18fc54e2150daffc14654 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01H49-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H02N13-00 |
| filingDate |
2006-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28575592bd3f59d10c2277e1617c3d1c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fd811f9b52ee3e7963d027e014110bcc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9fdc401c9fe829c511c5844add7095e4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fe5b453d49ab29c3db78381743ccda67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ae3d49bbb3b08ae2b39b254f9a44c401 |
| publicationDate |
2008-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2008155342-A |
| titleOfInvention |
Manufacturing method of fine structure |
| abstract |
A movable structure including an insulating layer made of an inorganic material such as silicon oxide can be easily manufactured with a high yield by using a sacrificial layer made of a resin. A metal sacrificial layer 107 is formed on the upper surfaces of a support member 105 and a first resin sacrificial layer 106. Next, a silicon oxide film is deposited on the upper surface of the metal sacrificial layer 107 by a sputtering method. The insulating layer 108 is formed by processing using the photolithography technique and the etching technique, and then a movable structure including the plate-like upper electrode 111, the beam part 112, and the anchor part 113 is formed. State. [Selection] Figure 2 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108238581-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105836697-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105836697-A |
| priorityDate |
2006-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |