http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008153271-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6bfdf49224a405be1f7b653c56ebad94 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2006-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b293fbb1964166854af7c6848770ead1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7bc82386b14853f52157e740541d67e4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b47790e96f343a16ffab0eeea3508a11 |
| publicationDate | 2008-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008153271-A |
| titleOfInvention | Cleaning method and cleaning composition for used jig |
| abstract | In a jig made of a quartz member used in a semiconductor element manufacturing process, it is possible to efficiently remove only deposits while suppressing corrosion of a substrate surface, and for cleaning a jig made of a member such as ceramics. It is also possible to provide a method for cleaning a used jig, which is economical and safe and does not use hydrofluoric acid itself, which is very harmful to the human body. A cleaning liquid composition in which an inorganic acid such as nitric acid and a fluoride other than hydrofluoric acid such as ammonium fluoride are mixed is used, and the used jig is cleaned by bringing the cleaning composition into contact with the jig. To enable reuse. [Selection figure] No selection figure |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011105539-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7985297-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101043362-B1 |
| priorityDate | 2006-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 58.