http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008152203-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C39-17 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2006-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4299fd2a71c1d86ccd512fa49e4b6d15 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_817f940401b789132740205f97c4aa0e |
| publicationDate | 2008-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008152203-A |
| titleOfInvention | Underlayer resist composition, novel compound useful for the composition, and pattern formation method using the composition |
| abstract | A composition capable of forming a lower resist layer having excellent etching resistance and antireflection function and having reduced scum in the upper layer for image formation, a novel compound added to the composition, and the composition are used A pattern forming method is provided. (A) a resin having at least one of an aromatic hydrocarbon structure and an alicyclic hydrocarbon structure, (B) having at least one adamantane structure, activated by an acid, and (A) A lower resist composition containing a methylolated phenolic compound or a methylolated melamine compound that reacts with a component to form a crosslinked structure, and (C) a compound that decomposes by heat to generate an acid, the composition A novel methylolated phenolic compound having at least one adamantane structure useful for products, activated by an acid, and reacting with the component (A) to form a crosslinked structure, and the composition Pattern formation method. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10066057-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012098828-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010107963-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105037106-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015129307-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2012098828-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6007793-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8841059-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010038742-A1 |
| priorityDate | 2006-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 181.