http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008145674-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38 |
| filingDate | 2006-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d8eb0423c882e0be7f0ca48a9635f1a4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5ab6894079cc2e725dba2cb817a338b3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23c43aa3fe55d690d955960d87a560cc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a3a0a538b98c555f45ce7416642b545c |
| publicationDate | 2008-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008145674-A |
| titleOfInvention | Resist surface modifier and resist pattern forming method using the same |
| abstract | Provided is a resist surface modifier that can sufficiently improve the wettability to a developing solution by modifying the surface of a photoresist film and is excellent in safety, and a resist pattern forming method using the same. An amine oxide compound having one alkyl group or hydroxyalkyl group having 8 to 20 carbon atoms which may be interrupted by an oxygen atom, and two alkyl groups or hydroxyalkyl groups having 1 to 5 carbon atoms. And an amine having 2 to 8 carbon atoms or a hydroxyalkyl group having 8 to 20 carbon atoms and one alkyl group or a hydroxyalkyl group having 1 to 5 carbon atoms which may be interrupted by an oxygen atom An aqueous solution containing at least one oxide compound is used as a resist surface modifier. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8618002-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015045836-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010064600-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017044928-A |
| priorityDate | 2006-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 90.