| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_562de9eaba2b90ce100ddce9749e926d |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-335
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-332
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-19
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-215 |
| filingDate |
2006-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0e576df9bad96120936bb4cda8a460f1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9589f0ea02b6b19582a1f58c97a68b90 |
| publicationDate |
2008-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2008131062-A |
| titleOfInvention |
Method for manufacturing piezoelectric vibrating piece, piezoelectric vibrating piece and piezoelectric device |
| abstract |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a piezoelectric vibrating piece in which a side surface portion (211) of a piezoelectric vibrating piece (20) has a clean rectangular shape. A manufacturing method of manufacturing a piezoelectric vibrating piece (20) includes a step (S10) of preparing a flat piezoelectric material (10) having etching anisotropy in a predetermined direction, and piezoelectric vibration in the piezoelectric material. In order to form a piece, a step of wet-etching the piezoelectric material (S18) and a laser processing step of irradiating the side portion of the wet-etched piezoelectric vibrating piece with laser light to remove a part of the side portion ( S20). [Selection] Figure 6 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010050687-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113629187-A |
| priorityDate |
2006-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |