| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_421cadb30fc0074fe61126eb980d19d6 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-305
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-28 |
| filingDate |
2006-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f15f05da2b965e11c746c75607b8c05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_030e920a918d9cb46205ddb6ef4a04c4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_efae98e548758a47c517ea3662394641
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a6f569262d74fd455a3fc082600dd26 |
| publicationDate |
2008-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2008123891-A |
| titleOfInvention |
Charged beam device and mirror body thereof |
| abstract |
A charged beam apparatus capable of suppressing a decrease in beam resolution even when gas treatment is performed. [Solution] In a charged beam apparatus comprising an electron source 3 for generating an electron beam 19 and a mirror body 150 having an objective lens magnetic path 23 for forming an electron lens for focusing the electron beam 19 from the electron source 3 on a sample 30. A gas gun 28 having a jet hole 130 through which reactive gas is jetted toward the irradiated portion of the electron beam 19 on 30 and mounted in the mirror 150 is provided. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9312096-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7284695-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014030433-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012074194-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8984187-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012242146-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012043363-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010113810-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010219013-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022004229-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9478389-B2 |
| priorityDate |
2006-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |