http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008122890-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1335 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-20 |
| filingDate | 2006-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8e0ab18bc267841f438496f063934a0a |
| publicationDate | 2008-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008122890-A |
| titleOfInvention | Manufacturing method of color filter |
| abstract | A color filter manufacturing method using a dry etching method, which is capable of manufacturing a color filter having fine and rectangular pixels and excellent flatness. An etching stopper layer is formed on a first colored layer provided on a support, and the first colored layer corresponding to a region where the second colored layer is to be formed is removed by a dry etching method. . A second colored layer was formed so as to fill the removed region. After the second colored layer was removed until the etching stopper layer was detected, an etching stopper layer was formed. Next, the first colored layer corresponding to the region where the third colored layer is to be formed is removed by a dry etching method. In this method, a third colored layer is formed so as to embed the removed region, and the colored layer laminated on the colored layer is removed until the etching stopper layer is exposed. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8300886-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010085701-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010085703-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010085702-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010085700-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8855370-B2 |
| priorityDate | 2006-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 472.