| abstract |
Provided is a sulfonium salt that does not shift to an aqueous phase in a resist for immersion exposure. [Chemical 1] (R 1 and R 2 are the same or different, C1-18 alkyl group, C1-18 alkoxy or C1-8 perfluoroalkyl, m and n are the same or different, 1-5, m R 1 , n R 2 is the same or different, R 3 represents C1-18 alkyl, C1-18 alkoxy, C1-8 perfluoroalkyl or a group of the formula (2), R 3 represents C1-18 alkyl, C1-18 alkoxy or C1-8 k when perfluoroalkyl is 0-5, k-number of R 3 are the same or different, it is k when the group R 3 is the formula (2) 1, X - sulfonium salts of anions). [Selection figure] None |