http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008119565-A

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filingDate 2006-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5ffa89cf945833e3fffa6c67cddcb918
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publicationDate 2008-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2008119565-A
titleOfInvention Filter member and method of manufacturing filter member
abstract A filter member having a separation layer in which a large number of pores are formed with a uniform pore size, and capable of separating a gas component according to the pore size of the pores, and the pore size of which is uniform. To provide a method for producing a filter member that can be formed with good reproducibility and whose size can be easily controlled. A filter member 1 is a filter member that separates a gas component contained in a gas in accordance with the size of a molecule, and a porous body 2 and a separation layer provided on the surface of the porous body 2 3, the separation layer 3 is mainly composed of an obliquely deposited film 31 having a large number of pores 312 penetrating at an almost constant angle with respect to the surface of the porous body 2. When the separation target gas is a mixed gas containing methanol vapor and its decomposition product, the average pore size in the separation layer 3 is set to about 0.1 to 0.8 nm. [Selection] Figure 1
priorityDate 2006-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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