http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008111147-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4481 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-448 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01G15-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J4-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J7-00 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F5-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2006-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a58ac696a2b0efc43ce32536e9b4e708 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f982085b659cd59eb4d997b00018b18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b647cf547306909088a5103a6d3e2ebb |
| publicationDate | 2008-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008111147-A |
| titleOfInvention | Method for supplying solid organometallic compound |
| abstract | Provided is a method for supplying a solid organometallic compound that can supply a solid organometallic compound at a more stable concentration at room temperature and can further increase the usage rate of the filled solid organometallic compound. In a method in which a solid organometallic compound is filled in a filled container at room temperature, a carrier gas is introduced, a gas containing the organometallic compound is taken out, and the solid organometallic compound is supplied. The pellets of the solid organometallic compound contained are filled in the filling container, and the pellets to be used are composed of a plurality of pellet-shaped recesses provided on the molding plate with an inert carrier and a solid organometallic compound. It is characterized in that it is filled and solid organometallic compound is heated and melted, and then solidified by cooling and molded in advance. [Selection] Figure 1 |
| priorityDate | 2006-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 42.