| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4ed3d9b68c7a27b6f8be5ee422cdcca4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5db580deca7130dbe51805c6c608b35 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H2003-023 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-568
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-174
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-173
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02118
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-132
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H3-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-54 |
| filingDate |
2006-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2fadcc6f9b1b9ac35954176f42549e9e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d4dc4aa29a65b6a53a7d14787efe19ba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f83f4d200afa0828d46f578dc706e5c6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0f913e60126a97ac07db089e131b1b1e |
| publicationDate |
2008-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2008109414-A |
| titleOfInvention |
Piezoelectric thin film resonator and filter |
| abstract |
A piezoelectric thin film resonator and a filter capable of suppressing dissipation of vibration energy from a resonance part are provided. The present invention relates to a lower electrode (43) provided on a gap (46) of a substrate (41), a piezoelectric film (44) provided on the lower electrode (43), and a piezoelectric film (44). ) And an upper electrode (45) provided on the piezoelectric film (44) so as to have a resonance part (47) facing the lower electrode (43). The lower electrode (43) and the upper electrode ( 45) has a wiring part (48) for drawing a signal from the resonance part (47) on the gap (46), and at least one of the lower electrode (43) and the upper electrode (45) is a wiring A piezoelectric thin film resonator and a filter in which the mass per unit area in contact with the piezoelectric film (44) in the part (48) is smaller than the mass per unit area in the resonance part (47). [Selection] Figure 4 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017208711-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109690946-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109690946-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10790797-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017147719-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10270422-B2 |
| priorityDate |
2006-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |