http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008107409-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c1755eede76ea7e719a3e0d2843cd793 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 |
| filingDate | 2006-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cef734ceac173a4338690d767de80a7b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_21b4e52d634190f4390d3507237f7d98 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d280137b06fba6f97ec96d018faf9b26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_81ac6b5cd2828362eee659894a0765c9 |
| publicationDate | 2008-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008107409-A |
| titleOfInvention | Photosensitive composition, pattern film manufacturing method using the same, and semiconductor element |
| abstract | For example, a photosensitive composition capable of obtaining a patterned film having excellent insulation performance without performing heat treatment at a relatively high temperature of 500 ° C. or higher, a method for producing a patterned film using the same, and a semiconductor element provide. At least one compound selected from the group consisting of a monofunctional alkoxysilane compound, a monofunctional silanol compound, a monofunctional epoxy compound, and a monofunctional isocyanate compound is used as the alkoxysilane condensate (A). A photosensitive composition containing component (X) obtained by reacting (B) and an acid or base generator (Y) that generates an acid or a base when exposed to light, and a pattern film using the same Manufacturing method, semiconductor element. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8697332-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102365341-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101775737-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020021775-A |
| priorityDate | 2006-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 413.