| abstract |
【Task】 A decomposition treatment method and a catalyst for efficiently decomposing a fluorine compound-containing gas such as C 2 F 6 are provided. [Solution] A gas flow containing at least one of a compound containing two or more carbons and containing a fluorine atom or a compound containing a nitrogen atom and a fluorine atom, such as C 2 F 6 , is at least one of alumina, titania, silica and zirconia. The F in the gas stream is converted to HF by contacting the catalyst with the catalyst at a temperature of about 400 to about 800 ° C. in the presence of an effective amount of water vapor. 【effect】 The fluorine compound-containing gas can be efficiently decomposed. [Selection] Figure 2 |