http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008098629-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-95615 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-4788 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-95607 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2007-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d215910a0009cd115b34c8d6f73f47f4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca49d284e69f9416be63854e0d8e985f |
| publicationDate | 2008-04-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008098629-A |
| titleOfInvention | How to improve the accuracy of optical measurements |
| abstract | A method and system for changing the optical properties of an adjustable resist that can be used in the manufacture of electronic devices such as integrated circuits. A method and system for improving the accuracy of measurement using optical metrology is provided. The present invention further provides a method and system using a tunable resist layer. The tunable resist layer provides a first set of optical properties before exposure and a second set of optical properties after exposure. [Selection figure] None |
| priorityDate | 2006-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 160.