http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008091681-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4af0df9a26ff4aafde7285cbd8eb12f4 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C28-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 |
| filingDate | 2006-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c69ef2cfd73bc438f80e7b0a038e5cb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_73889e70b42f2293629e0fcf4806d041 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c1eea674deb034a338102e35838f7d72 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7c71b91eebb5a5d6a9fc933a2fb7f432 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_249a7e8db9105a0d5436767d688d192b |
| publicationDate | 2008-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008091681-A |
| titleOfInvention | Thin film carrier substrate and manufacturing method thereof |
| abstract | The present invention provides a thin film carrier substrate capable of increasing the adhesion of alignment marks and a method for manufacturing the same. As shown in FIG. 2 (c), a fluorination treatment portion 6 having a positioning pattern is formed on a substrate 3 having a polyimide layer 2, and then a fluorination treatment portion as shown in FIG. 2 (d). 6 and the exposed surface of the polyimide layer 2 are formed, and the Al thin film 7 is etched for positioning pattern and transfer pattern as shown in FIGS. A transfer pattern 11 is formed on the fluorination processing unit 6, and a positioning pattern 10 is formed in an area where the fluorination processing unit 6 is not present. As a result, the positioning pattern 10 can obtain greater adhesion than the transfer pattern 11. [Selection] Figure 2 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022224438-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021257227-A1 |
| priorityDate | 2006-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.