http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008089377-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-067 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 |
| filingDate | 2006-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d05f8f6645abaaa0bafde73e6467239b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a1a98736792de9a635977c4ac112abcb |
| publicationDate | 2008-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008089377-A |
| titleOfInvention | Sheet probe, method of manufacturing the same, and application thereof |
| abstract | A sheet-like probe capable of suppressing a load applied during wafer inspection as much as possible and stably maintaining a good electrical connection state and a method for manufacturing the same are provided. A front electrode portion, a back electrode portion, and a short-circuit portion connected to the back electrode portion, extending through the insulating layer in the thickness direction continuously from the base end portion of the front electrode portion. 28 and a hollow portion 28H extending in the thickness direction of the insulating layer and communicating the surface electrode portion and the back electrode portion, the short-circuit portion is disposed on the outer peripheral side of the hollow portion of the insulating layer, and the surface electrode portion is The base end connected to the short-circuit portion, the opening on the surface electrode portion side of the hollow portion, the protrusion 24a positioned at the center of the surface electrode portion, the protrusion of the surface electrode portion, and the surface electrode portion A rotation force is provided by connecting the base end portion and a rotational force imparting connection portion 24c positioned in the opening on the surface electrode portion side of the hollow portion, and pressing the protruding portion of the surface electrode portion toward the hollow portion. The protrusion of the surface electrode portion is rotated by the application connecting portion. [Selection] Figure 3 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017069136-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10802048-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111679104-A |
| priorityDate | 2006-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.