http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008085353-A

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assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-187
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filingDate 2007-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fe1b12c12fd6056821897c3f5b346480
publicationDate 2008-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2008085353-A
titleOfInvention Piezoelectric element and liquid discharge head
abstract Provided is a method of manufacturing a piezoelectric element capable of obtaining desired good crystallinity and improving the in-plane uniformity of piezoelectric characteristics, and a piezoelectric element with improved uniformity is provided. provide. A step of applying an organometallic compound sol 411 ″, a step of drying the organometallic compound sol, and a step of degreasing the organometallic compound sol (S4). The step of crystallizing the gelled organometallic compound 411 ′ (S5) and the step of forming a piezoelectric layer comprising a plurality of times are laminated (S6). The heating rate during heating is set to 500 ° C./min or less. [Selection] Figure 4
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014112665-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010253692-A
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priorityDate 2007-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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Total number of triples: 31.