http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008085353-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-187 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-43 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-318 |
filingDate | 2007-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fe1b12c12fd6056821897c3f5b346480 |
publicationDate | 2008-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2008085353-A |
titleOfInvention | Piezoelectric element and liquid discharge head |
abstract | Provided is a method of manufacturing a piezoelectric element capable of obtaining desired good crystallinity and improving the in-plane uniformity of piezoelectric characteristics, and a piezoelectric element with improved uniformity is provided. provide. A step of applying an organometallic compound sol 411 ″, a step of drying the organometallic compound sol, and a step of degreasing the organometallic compound sol (S4). The step of crystallizing the gelled organometallic compound 411 ′ (S5) and the step of forming a piezoelectric layer comprising a plurality of times are laminated (S6). The heating rate during heating is set to 500 ° C./min or less. [Selection] Figure 4 |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014112665-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010253692-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010253691-A |
priorityDate | 2007-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.