http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008081646-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L83-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 2006-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_febd603bdcc62588ea92685cb5ac17d0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_40653aaff131aa246672f0e0d18e9853 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dfd817b3b4b7b6b42ab0ea6796adcec2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ac0718ae5232ffcd9bd7648780e409bc |
| publicationDate | 2008-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008081646-A |
| titleOfInvention | Silsesquioxane compound mixture, hydrolyzable silane compound, production method thereof, resist composition using the same, pattern formation method, and substrate processing method |
| abstract | A condensation degree containing a silsesquioxane unit having a side chain having a structure in which a norbornane skeleton in which a methylene group may be partially substituted with oxygen and a silicon atom is directly bonded is substantially present. 100% silsesquioxane compound mixture, wherein the silicon-bonded side dimethylene chain of the norbornane skeleton is substituted by one or more substituents other than hydrogen, and the dimethylene chain The bulky substituents contain silsesquioxane units having side chains with a higher proportion of isomers occupying the exo position. The present invention provides a silsesquioxane compound or a mixture thereof having a substantially 100% condensation degree that is particularly suitable for a chemically amplified positive resist composition. Furthermore, the resist composition using the silsesquioxane compound mixture having a degree of condensation of 100% obtained according to the present invention has higher resolution than that of the conventional one, particularly for the formation of minute repetitive patterns. It has high performance. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020196642-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101296889-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113906084-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012533674-A |
| priorityDate | 2006-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 297.